Features introduction
Cluster evaporator, equipped with two transmission chambers, four evaporation process chambers, mask separation and replacement chamber, vacuum annealing chamber;
Precision alignment system;
Equipped with glove boxes;
All dry/tandem perovskite solar cells, flexible and changeable process;
Evaporation perovskite inorganic salt & organic salt, ETL, passivation layer, metal electrode layer and so on;
Built-in perovskite co-distillation program for various materials.
Technical performance
Parameter
Substrate: 300mm*300mm*3.2mm