Products and Solutions

PV Module Manufacturing Solution

Multi-source Co-evaporation Dry Process Perovskite Cluster Evaporator

Features introduction

Cluster evaporator, equipped with two transmission chambers, four evaporation process chambers, mask separation and replacement chamber, vacuum annealing chamber;
Precision alignment system;
Equipped with glove boxes;
All dry/tandem perovskite solar cells, flexible and changeable process;
Evaporation perovskite inorganic salt & organic salt, ETL, passivation layer, metal electrode layer and so on;
Built-in perovskite co-distillation program for various materials.

Technical performance

  • Breakage rate: < 0.1%
  • Substrate quantity per cassette: 10 pcs
  • Between/Within uniformity<5%

 

Parameter

Substrate: 300mm*300mm*3.2mm

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