Products and Solutions

PV Cell Manufacturing Automation Equipment

Large width linear evaporation equipment

Features

Linear layout, equipped with a precision transmission system;
Meeting customization requirements, point sources or line sources can be configured for different materials;
Modular point source/line source integrated components ;
Professional nozzle simulation, stable plating rate, and uniform film formation.

Performance

  • Effective width: 600mm.
  • Tact time: 60s
  • Rate stability: ≤±3%
  • Crucible volume: 2200cc;
  • Substrate quantity per cassette:: 1pcs;
  • Maintenance: once/10 days
  • Between/Within uniformity: <5%.

 

Parameter

Layout:25000mm*1400mm*2000mm

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