Performance

• Equipment capacity >32000Pcs/h(232pcs half cell per basket)(1.2GW@210B、1GW@182B)
• Breakage rate< 0.3‰;
• Reflectivity> 40%, texture uniformity<1%,texture uniformity between cell<1%;
• Step width greater than 15um ;
• Uptime: ≥97%;
• Ozone concentration > 40 ppm ;
• Product yield >99.9%

Parameter

Cleaning process:O3-Clean→SDE→O3-Clean→DHF→DRY