Features
Uniform flowing&Pressure chamber with Multilayer uniform plate make up a high-efficiency and stable liquid distribution system;
Self-compensating dynamic balancing exhaust system;
Arm dispatch system, Achieve flexible production;
Uses infrared heating system to heat water ; no metal ion precipitation ;
Acid-base area is isolated by an automatic gate;
Drying equipped with chemical filter , ensure O3 gas concentration < 10ppb.
Performance
Parameter
Cleaning process: O3-Clean→SDE→PreCln→TEX→Post1→CP ( →Post2)→DHF→DRY